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MEMS Flow and Pressure Modules


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability.  The module has very low operating power consumption for optimal power management in portable applications. This version is externally powered, up to 5.5V (3.3V typ.). I2C digital output is standard.


The MFC2030 includes firmware that is highly configurable, offering the user a variety of settings that can be tailored to specific applications. This includes data output type, calibration settings, measurement modes, and power consumption. A user-friendly PC-based application offers the user a variety of data collection options, including real-time graphical display. Mechanically, the unit includes fittings that can accept a variety of standard inlet tube sizes, both BSP and NPT. Manifold mounting is also available. Click here for more information on configurations. 


MFC2030 is a true thermal mass flow sensing module, and can easily be configured to suit a variety of applications, from medical flow to industrial processing. Customized versions, including customer specific bulk channel and mounting options are available. Evaluation kits with USB PC interface, PC software and cable are available. 

Type Flow
Range +/- 30 SLM
Detectable Signal 0
Accuracy 3%MV (3 - 30 SLM) 0.3%FSR (< 3 SLM)
Output Digital (I2C) or Analog (PWM)
Sleep Mode 0.05
Supply Voltage 2.7 - 5.5
  • Flow range (+/- 30 SLM)

  • Bi-directional

  • High measuring accuracy: +/- 3% m.v. (3-30 SLM), 0.3% f.s.r. (< 3 SLM)) 

  • Low power consumption

  • Single 2.7 - 5.5Vdc power supply

  • Digital I2C and analog outputs

  • Calibrated over temperature

  • Highly configurable firmware

  • Easy-to-use PC-based GUI

Industrial Flow

Mass Flow Controllers

Medical Equipment

Natural Gas Metering and Detection

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